TL-107 – Pump Choice Supports Continuous Production at Hitachi

Reprinted from ENGINEER’S DIGEST FOCUS ON FACILITIES In addition to an ultra-clean environment, the fabrication of high quality silicon wafers — submicron integrated circuits — requires dependable equipment to ensure continuous production. So, you can imagine the concern when maintenance personnel at Hitachi’s wafer fabrication facility in Irving, Texas, discovered that original pumps were not […]

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